A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor
نویسندگان
چکیده
An interface for MEMS gyroscope is implemented in 0.18μm HVCMOS technology, and achieves a low noise floor of 1m°/sec/ Hz over 200Hz BW. Electromechanical forcefeedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation. Keywords-gyroscopes; Sigma delta modulation; Force feedback; Self-clocking; MEMS; Coriolis force
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